Wafer Process Systems Inc.

Manufacturer of Semiconductor, Disc Drive, Solar Cell and Flat Panel Manufacturing Process Equipment

 

 

Wafer Process Systems Inc. was established in 1983 and has since been providing service oriented customer satisfaction to device and material manufacturers in the Semiconductor, Disc Drive, Solar Cell and Flat Panel Display industries.

   

Wafer Process Systems Inc.  product line includes Manual, Semiautomatic and Fully Automated dry in / dry out Wet Chemical Process Equipment to perform a wide range of process applications such as SC1, SC2, Metal Etch, Nitride Strip, Oxide Etch, and H2SO4 / H2O2 Resist Strip, Organic Resist Strip, Side Wall Polymer Removal, Metal Lift Off and Electro-Chemical Deposition.

 

 

 

 

Automated Bulk Chemical Deliver Systems and

Wafer Process Systems Inc. manufactures world class wet process equipment using precision fluid controls and components for

all wet process applications. Applications include bulk chemical, delivery, point of use chemical recirculation and filtration, point

of use chemical metering, and chemical waste recovery. All chemical wetted components are PVDF, PTFE Teflon, PFA Teflon

or Quartz.

 

Bulk Chemical Handling and Fluid Control.

 

Point of Use Chemical Filtration and Fluid Control.

 

 

 

Standard Safety and Service Features:

 

            -           Three year warranty on all system electrical components and DI water components and two year warranty on all

                        chemical fluid components.

 

            -           Emergency power off circuit with remote mushroom kill switch located on front of cabinet and remote lock out

                        tag out knife switch electrical power disconnect.

 

            -           All UL, CSA or CE listed high voltage electrical components with component level circuit fused circuit protection.

 

            -           Photohelic® low exhaust monitor to interface with emergency power off circuit with audible and visual alarm.

 

            -           N2 purged electrical control panel enclosure with flow meter and purge pressure interlock to interface with

                        emergency power off circuit.

 

            -           Secondary containment plenum leak detector to interface with emergency power off circuit with audible and visual

                        alarm.

 

            -           UL Listed Photo Electronic Smoke Detector located in electrical head case to interface with emergency power off                         circuit.

 

            -           FM Approved Noveon® PVC-C constructed weldment with integral secondary containment plenum.

 

            -           Casters and leg levelers for transportation and installation.

 

            -           Electrical interlock switch keyed bypass switch to eliminate deactivation during servicing of tool.

 

            -           Stainless steel N2 and CDA manifold with high pressure and low pressure regulators with gauges.

 

            -           Flow through PFA Teflon DI Water manifold with Flaretek Teflon tube fittings and auto DI water shutoff.

 

            -           Removable front or rear access plumbing panels and electrical access panels with interlock switches to interface with

                        emergency power off circuit.

 

 

Optional Features:

 

            -           Access coded process operation requires Operator ID (Numeric), Recipe Select (Numeric), Product Lot

                        Identification (Alfa-Numeric), Chemical Data (Manufacturer, Lot Identification, Mixture Ratio, and Date of Dispense).

 

            -           Data logging of all PLC based controls.

 

            -           Microprocessor based Graphical User Interface with real time data acquisition and control.

 

            -           FM Approved 304 stainless steel constructed weldment with #4 finished for solvent chemical dispense systems.

 

            -           FM Approved 316 stainless steel constructed weldment with mirror polished finished for solvent chemical dispense                         systems.

            -           FM Approved CO2 Flame Suppression System with Dual Mode UV/IR flame detectors.