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Wafer Process Systems Inc. Systems Integration Welcome to WPS
Systems Integration a Leading Supplier of Wet Chemical Process
Equipment to the Semiconductor, MEMS, Photonics, Solar Cell, RFID, and Flat Panel Display
manufacturing industries since 1983 |
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Home About
Us
Semiconductor Wet Process Equipment Photovoltaic Wet Process Equipment Biomedical Wet Process Equipment Wafer Cassettes and Substrate Carriers PC Board Wet Process Equipment RFID Tag Wet Process Equipment Surplus Semiconductor Wet Process Equip Field Service and Spare Parts Warranty and Terms and Conditions News
Releases Contact Information |
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Wafer Process Systems Inc. automation concepts which incorporate Dual Axis Linear or Rotary Motion Positioning Systems in either pneumatic or servo applications provide a wide range of cost effective methods for substrate handling. Automated Wafer Transfer Systems are designed to accommodate a wide range of substrate sizes ranging from 100 mm to 300mm single or dual wafer cassettes. Systems are available in multi substrate size capabilities which make it ideal for Fab transitions or for wafer reclaim processes which require various size substrate processing capabilities. The operator interface is via a touch screen panel which provides full graphical display of all positioning system parameters. The touch screen control incorporates an alarm status panel which prompts the operator in the event of any alarm conditions and a maintenance screen which allows maintenance personnel the ability to control all functions manually or in an automatic mode. |
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Wafer Process Systems Inc. Model
WPS-1000-FA-A-2002-3001, Semi-Automated Front and Rear Access Batch Chemical
Process System The Wafer Process Systems Inc. Model WPS-1000-FA-A-2002-3001 incorporates a Linear Servo Positioning Systems for two process vessel configuration or multiple process vessel configurations. The systems is designed to accommodate dual 100 MM, 150 MM, 200 MM and single 300MM wafer cassette handling to provide broader process capabilities. The positioning system movement is performed by an independent numerical controller and incorporates interpolated movement for reduced transfer times and smoother movements. |
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Wafer Process Systems Inc. Model WPS-700-RA-A-150-200-1, Rear
Access Semi-Automated
150 MM Batch Chemical Process System The Wafer Process Systems Inc. Model WPS-700-RA-A-150-200-1 incorporates Linear Servo Positioning Systems for two process vessel
front to rear configurations which use independent
PLC controllers for each process module. All modules operated independently of each other and are provided with a UPS
for additional product safety in the event of power outages. Operator interface is via
a Colored Touch Screen located on front control panel. The PLC based
controllers permit both manual and automated operation of the Servo Positioning System. |
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Standard Safety and Service Features: |
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- Three year warranty on all system electrical components and DI water components and two year warranty on all chemical fluid components. - Emergency power off circuit with remote mushroom kill switch located on front of cabinet and remote lock out tag out knife switch electrical power disconnect. - All UL, CSA or CE listed high voltage electrical components with GCFI power circuit interrupt for all heat load power circuits and component level circuit fused circuit protection. - Photohelic® low exhaust monitor with audible and visual alarm to interface with emergency power off circuit. - N2 purged electrical control panel enclosure with flow meter and purge pressure interlock to interface with emergency power off circuit. - Plenum liquid level sensor located in chemical and rinse vessel plenum to interface with emergency power off circuit with audible and visual alarm. - UL Listed Photo Electronic Smoke Detector to interface with emergency power off circuit. - FM Approved Noveon® PVC-C constructed weldment with integral secondary containment plenum. - Casters and leg levelers for transportation and installation. - Electrical interlock switch keyed bypass switch to eliminate deactivation during servicing of tool. - Stainless steel N2 and CDA manifold with high pressure and low pressure regulators with gauges. - Flow through PFA Teflon DI Water manifold with Flaretek Teflon tube fittings and auto DI water shutoff. - Removable front or rear access plumbing panels and electrical access panels with interlock switches to interface with emergency power off circuit. |
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Optional Features: |
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- Access coded process operation requires Operator ID (Numeric), Recipe Select (Numeric), Product Lot Identification
(Alfa-Numeric), Chemical Data (Manufacturer, - Data logging of all PLC based controls. - Microprocessor based Graphical User Interface with real time data acquisition and control. - Automatic Bulk Chemical Dispense. - Vertical HEPA or ULPA laminar flow air filtration. - FM Approved 304 stainless steel constructed weldment with #4 finished and integral secondary containment plenum. - FM Approved 316 stainless steel constructed weldment with mirror polished finished and integral secondary containment plenum. - FM Approved CO2 Flame Suppression System with Dual Mode UV/IR flame detectors.
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