Wafer Process Systems Inc.

Manufacturer of Semiconductor, Disc Drive, Solar Cell and Flat Panel Manufacturing Process Equipment

 

 

Wafer Process Systems Inc. Model WPS-FA-RA-2002-3001, Fully-Automated Front and Rear Access Batch Chemical Process System

 

 

The Wafer Process Systems Inc. Model WPS-FA-RA-2002-3001 is a Fully-Automated Front and Rear Access Batch

Chemical Process System with 200MM and 300MM process capability which incorporates Y/Z Linear Servo Positioning Systems

to provide a wide range of movement controls to accommodate various process needs. Systems are designed to accommodate

two each 200MM wafer cassettes with twenty five wafers each cassette or one each 300MM wafer cassette with twenty six wafers

to provide broader process capabilities.

 

The positioning system movement is performed by an independent numerical controller and incorporates interpolated movement for reduced transfer times and smoother movements. A three level coded access provides low level access for Fab Process Operator

for wafer processing only using pre-programmed recipes; a medium level access for Fab Process Engineering personnel to edit

existing process recipes and program new recipes and high level access for Equipment Engineering personnel or Fab Supervisors, which provides full access to all functions of the control system.

 

The operator interface is via a colored touch screen panel which provides full graphical display of all process parameters. The touch screen controls incorporate an alarm status panel which prompts the operator in the event of any alarm conditions. A maintenance screen panel which allows service personnel the ability to control all functions manually and to calibrate temperature indicators and

auto tune all PID software functions. A positioning system maintenance screen panel permits the service personnel to operate the positioning system both in manual and automated operation modes. The integral database provides the ability to create multiple

recipes and download from process recipe select screen.

 

The access coded process operation requires Operator ID (Numeric), Recipe Select (Numeric), Product Lot Identification (Alfa-Numeric), Chemical Data (Manufacturer, Lot Identification, Mixture Ratio, and Date of Dispense).

 

Standard Features:

 

            -           Three year warranty on all system electrical components and DI water components and two year warranty on all

                        chemical fluid components.

 

            -           Emergency power off circuit with remote mushroom kill switch located on front of cabinet and remote lock out

                        tag out knife switch electrical power disconnect.

 

            -           All UL, CSA or CE listed high voltage electrical components with GCFI power circuit interrupt for all heat load

                        power circuits and component level circuit fused circuit protection.

 

            -           Photohelic® low exhaust monitor with audible and visual alarm to interface with emergency power off circuit.

 

            -           N2 purged electrical control panel enclosure with flow meter and purge pressure interlock to interface with

                        emergency power off circuit.

 

            -           Plenum liquid level sensor located in chemical and rinse vessel plenum to interface with emergency power off

                        circuit with audible and visual alarm.

 

            -           UL Listed Photo Electronic Smoke Detector to interface with emergency power off circuit.

 

            -           FM Approved Noveon® PVC-C constructed weldment with integral secondary containment plenum.

 

            -           Casters and leg levelers for transportation and installation.

 

            -           Electrical interlock switch keyed bypass switch to eliminate deactivation during servicing of tool.

 

            -           Stainless steel N2 and CDA manifold with high pressure and low pressure regulators with gauges.

 

            -           Flow through PFA Teflon DI Water manifold with Flaretek Teflon tube fittings and auto DI water shutoff.

 

            -           Removable rear access plumbing panels and electrical access panels with interlock switches to interface with

                        emergency power off circuit.

 

Optional Features:

 

            -           Data logging of all PLC based controls.

 

            -           Microprocessor based Graphical User Interface with real time data acquisition and control.

 

            -           Automatic Bulk Chemical Dispense.

 

            -           Vertical HEPA or ULPA laminar flow air filtration.

 

            -           FM Approved 304 stainless steel constructed weldment with #4 finished and integral secondary containment

                        plenum.

 

            -           FM Approved 316 stainless steel constructed weldment with mirror polished finished and integral secondary

                        containment plenum.

            -           FM Approved CO2 Flame Suppression System with Dual Mode UV/IR flame detectors.