Wafer Process Systems Inc.

Systems Integration

 

Welcome to WPS Systems Integration

a Leading Supplier of Wet Chemical Process Equipment to the Semiconductor, MEMS, Photonics, Solar Cell, RFID, Disc Drive

and Flat Panel Display manufacturing industries since 1983

 

 

Home      About Us      Semiconductor Wet Process Equipment      Photovoltaic Wet Process Equipment

 

Biomedical Wet Process Equipment      Wafer Cassettes and Substrate Carriers      PC Board Wet Process Equipment

 

RFID Tag Wet Process Equipment      Surplus Semiconductor Wet Process Equip      Field Service and Spare Parts

 

Warranty and Terms and Conditions      News Releases      Contact Information

 

 

Model WPS-SLFFH-FM-PVC-C, Factory Mutual Approved PVC-C Slopped Front Fume Hood

Wet Process System

 

Model WPS-600-PVC-C, Y/Z/Theta Series, Automated Wet Process System

The Wafer Process Systems Inc. Model WPS-SLFFH-800-FM-PVC-C, Factory Mutual Approved Noveon PVC-C Slopped

Front Fume Hood Wet Process System is designed to process Si and GaAs wafers in a class 10 environments. Systems are constructed out of FM approved CPVC, PVC-C, Polyvinylideneflouride (PVDF) Kynarâ or Ethylene Chlorotrifluoroethylene (ECTFE) Halarâ for corrosion resistance to acids and bases. Safety and ergonomics are main aspects in the system design.

Seismic bracing at six points insures additional safety to facility and personnel. All DI Water fluid components are accessible

through removable front access panels. All electrical components are accessible through front slide out control panels and

incorporate interlock switches with EPO interface for safety. All chemical wetted components are PVDF, PFA or Quartz.

 

 

 

 

Model WPS-800-SLFFH-FM-PVC-C, Factory Mutual Approved Noveon® PVC-C Slopped Front Fume Hood Wet Process System

 

 

 

 

Model WPS-400PVC-C, Y/Z Series, Automated Wet Process System

 

 

Standard Safety and Service Features:

 

            -           Three year warranty on all system electrical components and DI water components and two year warranty on all

                        chemical fluid components.

 

            -           Emergency power off circuit with remote mushroom kill switch located on front of cabinet and remote lock out

                        tag out knife switch electrical power disconnect.

 

            -           All UL, CSA or CE listed high voltage electrical components with GCFI power circuit interrupt for all heat load

                        power circuits and component level circuit fused circuit protection.

 

            -           Photohelic® low exhaust monitor with audible and visual alarm to interface with emergency power off circuit.

 

            -           N2 purged electrical control panel enclosure with flow meter and purge pressure interlock to interface with

                        emergency power off circuit.

 

            -           Plenum liquid level sensor located in chemical and rinse vessel plenum to interface with emergency power off

                        circuit with audible and visual alarm.

 

            -           UL Listed Photo Electronic Smoke Detector to interface with emergency power off circuit.

 

            -           FM Approved Noveon® PVC-C constructed weldment with integral secondary containment plenum.

 

            -           Casters and leg levelers for transportation and installation.

 

            -           Electrical interlock switch keyed bypass switch to eliminate deactivation during servicing of tool.

 

            -           Stainless steel N2 and CDA manifold with high pressure and low pressure regulators with gauges.

 

            -           Flow through PFA Teflon DI Water manifold with Flaretek Teflon tube fittings and auto DI water shutoff.

 

            -           Removable front or rear access plumbing panels and electrical access panels with interlock switches to interface with

                        emergency power off circuit.

 

 

Optional Features:

 

            -           Access coded process operation requires Operator ID (Numeric), Recipe Select (Numeric), Product Lot

                        Identification (Alfa-Numeric), Chemical Data (Manufacturer, Lot Identification, Mixture Ratio, and Date of Dispense).

 

            -           Data logging of all PLC based controls.

 

            -           Microprocessor based Graphical User Interface with real time data acquisition and control.

 

            -           Automatic Bulk Chemical Dispense.

 

            -           Vertical HEPA or ULPA laminar flow air filtration.

 

            -           FM Approved 304 stainless steel constructed weldment with #4 finished and integral secondary containment

                        plenum.

 

            -           FM Approved 316 stainless steel constructed weldment with mirror polished finished and integral secondary

                        containment plenum.

            -           FM Approved CO2 Flame Suppression System with Dual Mode UV/IR flame detectors.

 

Additional Services:

 

            -           Has your budget been cut due to the current economic crisis? If so contact Wafer Process Systems Inc. to                 retrofit or up grade your existing wet bench to accommodate your new process requirements.

 

            -           Is your equipment operating properly? If not contact Wafer Process Systems Inc. to schedule a field

                        service engineer to visit your facility and evaluate your current equipment issues.

 

Wafer Process Systems Inc. * 3641 Charter Park Drive * San Jose, California 95136 * Ph. (408) 445-3010 * Fax (408) 445-3004

*  Web Address www.waferprocess.com * Email @ info@waferprocess.com   *