Semiconductor Bench (Fully-Automated) Overview

We present our fully-automated semiconductor wet bench model WPS-FA-RA-300/450. A fully-automated 300mm/450mm front and rear access batch chemical wet process system with 300mm and 450mm process capability. This wet bench incorporates Y/Z linear servo positioning systems. This provides a wide range of movement controls to accommodate various process needs. The systems are designed to accommodate one each 300mm cassette with twenty five wafers or one each 450mm wafer cassette with thirteen or twenty five wafers to provide broader process capabilities.

Semiconductor Wet Bench Positioning System Overview

The positioning system movement is performed by an independent numerical controller. It incorporates interpolated movement for reduced transfer times and smoother movements. A three level coded access provides low level access for Fab Process Operator for wafer processing only using pre-programmed recipes; a medium level access for Fab Process Engineering personnel to edit existing process recipes and program new recipes and high level access for Equipment Engineering personnel or Fab Supervisors, which provides full access to all functions of the control system.